Combine precision magnetic field, rotation and the Angstrom Advantage™ with the ONYX-R Series to obtain high target utilization and exceptional film uniformity in your application.

Models are available for target sizes ranging from 4” to 16” diameter. Custom retrofits can also be designed to upgrade existing systems. Magnet modules can be fitted for high-permeability target applications or optimized to specific process requirements.

The ONYX-R Series was specifically engineered for the demanding semiconductor and media storage industries, providing the reliable, high-performance magnetron you've been looking for. Please feel free to contact us using the information request form or by calling 1.412.469.8466.

Introducing the newest product in the ONYX series of magnetron sputtering cathodes!

By taking advantage of its profiled magnet design, Angstrom Sciences has improved the typical rotating cylindrical magnetron’s performance, creating a deposition profile that is closer to normal between the source and the substrate. The improved deposition profile offers reduced debris accumulation on the chamber walls. Further to this inherent power savings, the Angstrom Sciences magnet array offers a higher magnetic field intensity, which provides the opportunity to run the sputtering process at lower power to achieve typical deposition rates.

The new patent-pending technology is designed to maximize existing cylindrical magnetron performance and throughput. Field testing verified a power savings as high as 20% using this new technology.

Other major features include:

• High Magnetic Field provides a low operating voltage for reduced power requirements.
• 5" OD, 4" ID design which means targets and backing tubes can be manufactured from common stock pipe or tubing.
• An optimized electrical transfer design to deliver high power while avoiding arcing as well as reduced brush wear and debris.
• An NW quick connect water-to-vacuum seal for Quick target changes, shorter down times and increased production.
• A universal and cost effective magnet design with customized turnarounds.
• Lightweight, easily-serviced product with off-the-shelf components for low-cost, long-term investment and reliability.

Retrofit services for your existing cylindrical design are also available. To learn more about our rotating cylindrical magnetron, click here or contact us today at 1.412.469.8466.