| Angstrom Sciences' Onyx-R Series Rotary Magnetron Assemblies satisfy the critical demands of micro-electronic applications where the utmost control in film deposition is mandatory. These cathodes are available individually for R&D testing or they can be retrofitted into existing cluster tools for improved system performance. |
| |
|
 |
|
| |
|
|
- Excellent Uniformity to +/-1%
- High Target Utilization = 50%
- Advanced Modeled Magnetic Assembly
- High Rate/High Current Density
- Digital Display of Rotational Speed
- Adjustable Rotatable Speed 1-170RPM
- Easy Mounting External “O”-Ring Seal
- 6.75”, 10”, 12”, 16” Diameter Targets for 3.75”, 6”, 8”, and 12” Substrates
|
|
Position |
Thickness |
3.5 |
9257 |
3 |
10919 |
2.5 |
11080 |
2 |
11140 |
1.5 |
11415 |
1 |
11356 |
0.5 |
11350 |
0 |
11459 |
-0.5 |
11340 |
-1 |
11339 |
-1.5 |
11310 |
-2 |
11140 |
-2.5 |
11078 |
-3 |
11077 |
-3.5 |
9511 |
|
| |
|
|
| |
|
Over All Uniformity +/-1% |
|
|
|
|
