Available in Direct-cooled, Indirect-cooled and UHV designs, these cathodes use a nominal 3” diameter x ¼” thick (76.2 mm OD x 6.35 mm thick) target and can run on RF, DC, and mid-frequency DC power.

The 3” indirect-cooled version is great for research and development applications. The threaded target clamp, provides quick target changes without breaking any water or vacuum seals. This patented design allows for varying target thicknesses without the use of special tools or ancillary clamping devices.

The 3” direct-cooled is designed for high rate production and applications, providing optimal thermal and electrical transfer through the target material in order to maintain high power levels.

The 3” UHV cathode is bakeable up to 400°C and offers demountable magnets. Its all-welded construction allows true 10^-10 Torr UHV compatibility and long-term cycle reliability.

For more information on any of our 3” designs, please complete our information request form or call Tom at 1.412.469.8466. Don’t forget to ask about the University Advantage Program.

Angstrom Sciences offers a full line of magnet retrofits for existing cylindrical magnetron designs. By incorporating our profiled magnet technology we can enhance the erosion and performance of your current cylindrical assembly. The advantages of our design include:

• Magnetic Field: The highest in the industry to provide a lower operating voltage and thus reduced power settings.
• Sputtered Film Flux Profile: ~ +/-10 deg. from normal (closest competitor is +/-14 deg.).
• Closest to normal design applies more material to the substrate.
• Increased rate provides power savings or higher throughput.
• Reduced shield debris improves process yields and process life.
• Tunable magnet array extends target life by eliminating end groove effects.

To learn more about how Angstrom Sciences retrofits can improve your application, contact Jason at 1.412.469.8466 or complete our information request form.