circular magnetrons |
| options :: mounts |
| |
| External Mount |
| In this configuration, the magnetron is equipped with a flange that mounts directly to the outside of the user's vacuum chamber. |
| |
| Internal Mounting Options |
| 1. |
Straight tube (fixed orientation) |
| 2. |
45-degree angled tube (fixed orientation) |
| 3. |
90-degree angled tube (fixed orientation) |
| 4. |
Adjustable mount (locks in place at a user-selectable angle) |
| 5. |
Flex mount (flexible water & power tubing, which the user clamps in place) |
|
| |
| Cluster Mounts |
| These mounts can be custom configured to the application, including confocal designs for co-sputtering processes. |
| |
| Shutters |
| Shutters can be supplied on most models for controlling deposition. |
