| |
ONYX-10 |
| |
Maximum Sputtering Power |
| |
| |
|
| 20 Kilowatts |
| (7 Kilowatts in clamped mode) |
|
| |
|
| 6 Kilowatts |
| (2.5 Kilowatts in clamped mode) |
|
| |
Cathode Voltage |
100 to 1500 volts |
| |
Discharge Current |
0.1 to 30 amps |
| |
Operating Pressure |
0.5 to 50 milliTorr |
|
 |
|
| |
Cooling Requirements |
| |
| |
Flow Rate @ Max. Power |
5 GPM |
| |
Max. Input Temperature |
20° C |
| |
Max. Input Pressure [open drain] |
60 psig |
|
|
|
| |
Target |
| |
| |
Form |
Circular / Planar |
| |
Diameter |
10.0" / 254 mm |
| |
|
| 0.250" - 0.500" |
| (6.35 mm - 12.7 mm) |
|
| |
Cooling |
Direct/Indirect |
|
|
|
| |
| |
Magnetic Enhancement |
Profiled NdFeB |
|
|
|
| |
|
|
|
| |
Mounting |
| |
| |
Source |
2.0" OD Tubing |
| |
Water |
0.50" OD Tubing |
| |
Power Connector, DC |
Type HN, External Threads |
| |
Power Connector, RF |
Type HN, External Threads |
| |
Power Cable, DC |
RG393 |
| |
Power Cable, RF |
RG393 |
|
|
|
| |
| |
Maximum Temperature |
100° C |
|
|
|
| |
| |
Source to Substrate Distance |
2" -
12" |
|
|
|
| |
Construction |
| |
| |
Cathode Body |
OFHC Copper |
| |
Anode |
304 / 316 Stainless Steel
|
| |
Insulator |
PTFE |
|
|
|
| |
| Dimensions [See Below] |
| |
A |
12.057" / 306.24
mm |
| |
B |
04.039" / 102.59
mm |
| |
C |
02.281" / 057.94
mm |
| |
D |
02.000" / 050.80
mm Typical |
|
|
