| |
ONYX-6 |
| |
Maximum Sputtering Power |
| |
| |
|
| 7 Kilowatts |
| (3 Kilowatts in clamped mode) |
|
| |
|
| 2.5 Kilowatts |
| (1 Kilowatt in clamped mode) |
|
| |
Cathode Voltage |
100 to 1500 volts |
| |
Discharge Current |
0.1 to 12 amps |
| |
Operating Pressure |
0.5 to 50 milliTorr |
|
 |
|
| |
Cooling Requirements |
| |
| |
Flow Rate @ Max. Power |
3 GPM |
| |
Max. Input Temperature |
20° C |
| |
Max. Input Pressure [open drain] |
60 psig |
|
|
|
| |
Target |
| |
| |
Form |
Circular / Planar |
| |
Diameter |
6.0" / 152.4 mm |
| |
|
| 0.250" - 0.750" |
| (6.35 mm - 19.05 mm) |
|
| |
Cooling |
Direct |
|
|
|
| |
| |
Magnetic Enhancement |
Profiled NdFeB |
|
|
|
| |
|
|
|
| |
Mounting |
| |
| |
Source |
1.0" OD Tubing |
| |
Water |
0.38" OD Tubing |
| |
Power Connector, DC |
Type HN, External Threads |
| |
Power Connector, RF |
Type HN, External Threads |
| |
Power Cable, DC |
RG393 |
| |
Power Cable, RF |
RG393 |
|
|
|
| |
| |
Maximum Temperature |
100° C |
|
|
|
| |
| |
Source to Substrate Distance |
2" -
12" |
|
|
|
| |
Construction |
| |
| |
Cathode Body |
OFHC Copper |
| |
Anode |
304 / 316 Stainless Steel
|
| |
Insulator |
PTFE |
|
|
|
| |
| Dimensions [See Below] |
| |
A |
8.45" / 214.7
mm |
| |
B |
5.17" / 131.3
mm |
| |
C |
1.38" / 034.9
mm |
| |
D |
1.00" / 025.4
mm Typical |
|
|
