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circular magnetrons |
| specifications :: high temperature |
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ONYX-3HT |
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Maximum Sputtering Power |
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DC |
1.5 Kilowatts |
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RF |
700 Watts |
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Cathode Voltage |
100 to 1500 volts |
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Discharge Current |
0.1 to 3 amp |
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Operating Pressure |
0.5 to 50 milliTorr |
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Cooling Requirements |
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Flow Rate @ Max. Power |
0.75 GPM |
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Max. Input Temperature |
20° C |
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Max. Input Pressure [open drain] |
60 psig |
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Target |
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Form |
Circular / Planar |
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Diameter |
3.00" / 76.20 mm
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| 0.010" - 0.375" |
| (0.254 mm - 9.525 mm) |
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Cooling |
Indirect |
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Magnetic Enhancement |
Profiled NdFeB |
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Mounting |
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Source |
0.75" OD Tubing |
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Water |
0.25" OD Tubing |
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Power Connector, DC |
Type N, External Threads |
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Power Connector, RF |
Type HN, External Threads |
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Power Cable, DC |
RG 142 |
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Power Cable, RF |
RG 393 |
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Maximum Temperature |
300° C |
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Source to Substrate Distance |
2.00"
- 12.00" |
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Construction |
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Cathode Body |
OFHC Copper |
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Anode |
304 / 316 Stainless Steel
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Insulator |
Macor |
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| Dimensions [See Below] |
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A |
3.80" / 96.52
mm |
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B |
2.25" / 57.15
mm |
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C |
0.06" / 01.52
mm |
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D |
0.75" / 19.05
mm Typical |
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Typical performance. Results may vary with process parameters
such as pressure, flow rate, target material, and substrate
rotation, etc. |
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Some custom-engineered and specialty magnetrons may not meet
standard specifications. |
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All Angstrom Sciences NdFeB magnets are totally encapsulated
and protected from degradation by water. |
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All sources available in various external configurations. |
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Specifications are subject to change without notice. |
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