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ONYX-1 |
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Maximum Sputtering Power |
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DC |
150 Watts |
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RF |
75 Watts |
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Cathode Voltage |
100 - 1000 volts |
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Discharge Current |
0.1 - 1 amp |
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Operating Pressure |
2 - 50 milliTorr |
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Cooling Requirements |
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Flow Rate @ Max. Power |
.3 GPM / .019 LPS |
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Max. Input Temperature |
68° F / 20° C |
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Max. Input Pressure [open drain] |
60 psig / 4 BAR |
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Target |
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Form |
Circular/Planar |
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Diameter |
1.0" / 25.4 mm
(+.000"/-.010") / (+000mm/-.254mm) |
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Thickness |
0.010" - 0.0625" / 0.25mm - 1.6mm |
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Cooling |
Indirect |
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Magnetic Enhancement |
Permanent [NdFeB] Encapsulated |
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Mounting |
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Source ["o"-ring seal] |
1" / 25.4mm |
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Water [OD tubing] |
0.187" / 4.75mm |
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Power Connector, DC/RF |
Type N Connector |
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Power Cable, DC/RF |
RG 142 |
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Maximum Temperature |
212° F / 100° C |
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Source to Substrate Distance |
2" - 12" / 50mm - 300mm |
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Construction |
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Cathode Body |
OFHC Copper |
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Anode |
304 Stainless Steel |
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Insulator |
CTFE |
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| Dimensions [See Below] |
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A |
1.5" / 38.1mm |
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B |
1.465" / 37.2mm |
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C |
0.5" / 12.7mm |
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D |
0.75" / 19.05mm Typical |
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