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ONYX-3 |
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Maximum Sputtering Power |
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DC |
1.5 Kilowatts |
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RF |
700 Watts |
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Cathode Voltage |
100 - 1500 volts |
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Discharge Current |
0.1 - 3 amp |
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Operating Pressure |
0.5 - 50 milliTorr |
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Cooling Requirements |
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Flow Rate @ Max. Power |
0.75 GPM / 0.047 LPS |
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Max. Input Temperature |
68° F / 20° C |
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Max. Input Pressure [open drain] |
60 psig
/ 4 BAR |
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Target |
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Form |
Circular/Planar |
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Diameter |
3.0" / 76.2 mm |
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Thickness |
0.010" - 0.375"
/ 0.254 mm - 9.525 mm |
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Cooling |
Indirect |
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Magnetic Enhancement |
Permanent [NdFeB] Encapsulated |
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Mounting |
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Source ["o"-ring
seal] |
0.75" / 19.05 mm |
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Water [OD tubing] |
0.25" / 6.35 mm |
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Power Connector, DC |
Type N, External Threads |
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Power Connector, RF |
Type HN, External Threads |
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Power Cable, DC/RF |
RG 1675 A |
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Maximum Temperature |
212° F / 100°
C |
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Source to Substrate Distance |
2.0"
- 12.0" / 50.8 mm - 304.8 mm |
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Construction |
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Cathode Body |
OFHC Copper |
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Anode |
304/316 Stainless Steel
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Insulator |
CTFE |
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| Dimensions [See Below] |
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A |
3.8" / 96.52
mm |
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B |
2.469" / 62.7126
mm |
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C |
0.06" / 1.524
mm |
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D |
0.75" / 19.05
mm Typical |
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