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ONYX-10R |
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Maximum Sputtering Power |
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DC |
20 Kilowatts |
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RF |
7 Kilowatts |
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Cathode Voltage |
100 to 1500 volts |
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Discharge Current |
0.1 to 30 amps |
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Operating Pressure |
0.5 to 50 milliTorr |
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Cooling Requirements |
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Flow Rate @ Max. Power |
5 GPM |
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Max. Input Temperature |
20° C |
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Max. Input Pressure [open drain] |
60 psig |
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Target |
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Form |
Circular / Planar |
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Diameter |
10.00" / 254.00 mm
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|
| 0.125" - 0.750" |
| (3.175 mm - 19.05 mm) |
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Cooling |
Direct / Bonded |
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Magnetic Enhancement |
Profiled NdFeB |
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Mounting |
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Source |
External Flange 0-Ring
Seal |
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Water |
0.50" OD Tubing |
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Power Connector, DC |
Screw Termination |
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Maximum Temperature |
100° C |
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Source to Substrate Distance |
2.00"
- 12.00" |
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Construction |
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Cathode Body |
OFHC Copper |
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Anode |
304 / 316 Stainless Steel
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Insulator |
PTFE |
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| Dimensions [See Below] |
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A |
15.180" / 385.75
mm |
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B |
12.438" / 315.93
mm |
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C |
10.000" / 254.00
mm |
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D |
03.750" / 095.25
mm |
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E |
13.750" / 349.25 mm |
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