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rectangular magnetrons

specifications

Specifications are subject to change without notice. Please contact us for actual specifications regarding your application.

Linear

Maximum Sputtering Power

	Direct Cooled, DC	Maximum Watts / Sq. Inch = 250
	Direct Cooled, RF	Maximum Watts / Sq. Inch = 1/3 of DC
	Indirect Cooled, DC	Maximum Watts / Sq. Inch = 100
	Indirect Cooled, RF	Maximum Watts / Sq. Inch = 1/3 of DC
	Cathode Voltage	100 to 1500 volts
	Discharge Current	0.4 amps / Sq. Inch
	Operating Pressure	0.5 to 50 milliTorr

Cooling Requirements

	Flow Rate @ Max. Power	1 GPM / 4KW
	Max. Input Temperature	20° C
	Max. Input Pressure [open drain]	60 psig

Target

Form

Rectangular/Planar

Diameter

Standard Cross-Sections 1.5"/38.1mm

3.5"/88.9mm, 5.0"/127mm, 6.0"/152.4mm

Thickness

Typical 0.250"/6mm, 0.50"/12.7mm

0.75"/19mm, 1.0"/25.4mm

Cooling

Indirect / Direct

Magnetic Enhancement

Permanent [NdFeB]

Weight

Weight depends on dimensions

Mounting

	Source	Customer Specified
	Water	Customer Specified
	Power	Customer Specified

Maximum Temperature

100° C

Source to Substrate Distance

2" - 12"

Construction

	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE

Dimensions [See Below]

Internal Mount

External Mount

Target Length

+2.0" / 50.8mm

Target Length

+ 3.5" / 88.9mm

Target Width

+2.0" / 50.8mm

Target Width

+ 3.5" / 88.9mm

3.5" / 88.9mm

Typical

3.5" / 88.9 mm

Typical

N/A

Target Width

+ 2.0" / 50.8mm

N/A

Target Length

+ 2.0" / 50.8mm

Internal Mount

External Mount

	Typical performance. Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
	Some custom-engineered and specialty magnetrons may not meet standard specifications.
	All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
	All sources available in various external configurations.
	Specifications are subject to change without notice.