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ONYX® 2" DC / IC Target, Low Pass-Through Flux Magnetics

Specifications

Magnetron Specifications: US Specifications | Metric Specifications

Construction

Cooling Requirements

Flow Rate at Maximum Power
Maximum Input Pressure, Open Drain
Maximum Input Temperature

Dimensions

General

Magnetic Enhancement	Permanent (NdFeB) Encapsulated
Maximum Temperature
Source to Substrate Distance
Weight, Approximate Without Options

Maximum Sputtering Power *

Mounting, Standard

Power Cable, DC	RG393
Power Cable, RF	1675A
Power Connector, DC	Type N Connector, External Threads
Power Connector, RF	Type HN Connector, External Threads
Stem, Outer Dimension Tubing
Water, Outer Dimension Tubing

Target

Specifications Disclaimer

All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
All sources are available in external configurations.
Magnetic material calculations are optimized with Nickel targets.
* Maximum power for cathode only, a target material’s properties, such as, thermal and electrical conductivity may limit the maximum process power level.
Some custom-engineered and specialty magnetrons may not meet standard specifications.
Specifications are subject to change without notice.
Thickness will vary depending upon coercivity of target material.
Typical performance. Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.

Please contact us for specifications regarding your application.