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Because RF power tends to stray, it is vital in high power RF applications that the magnetron sputtering cathode is designed to rein in that power. Angstrom Sciences’ High Power RF circular magnetron is designed to deliver high RF power densities uniformly across the target surface while providing low reflected power. Angstrom Sciences creates a wide magnetic field that maximizes target active area. With less dead space, your process will see less material redeposition and minimal arcing. Additionally, our profiled magnet array yields high target utilization, minimal arcing, and long-term reliability. Circular High Power RF Magnetrons are directly cooled and available in 2"-8" outer diameters. |
