For applications that require the substrate to be exposed to extended periods of high thermal contact, Angstrom Sciences’ High Temperature circular magnetrons are optimized with ceramic insulators that allow the cathode to sustain performance parameters in temperatures up to 350 °C with cooling water running.
High Temperature circular magnetrons are designed for operation in the 10-9mTorr range and are specially engineered to allow for variations that may occur throughout thermal cycling without leaks or film quality deviation.
