Versatile, Compact Design Their compact design makes our circular magnetrons ideal for any new or retrofit application, including the most complex cluster assemblies for the smallest vacuum chambers.Total Power Compatibility Low-impedence heads provide RF, DC, mid-frequency DC, pulsed DC, and microwave power compatibility.Standard Fittings We use ISO NW standard fittings, as well as Conflat® metal seal flanges. All utilities are maintained at atmosphere and accessed through standard O-ring compression fittings for easy installation in any vacuum system.Full Range of Sizes Circular magnetron sources are available from 1 through 16 inch target diameters in either standard or custom configurations.Quick, Easy Target Change Our patented threaded target clamp and anode shield allow you to change targets without the use of ancillary tools. Their built-in adjustability also lets you fit targets of varying thickness without resorting to spacing devices.Lower, Pressure, High Power ONYX® magnetrons can operate at extremely low pressure (down to the 10-4 Torr range), and our direct cooled designs can deliver power densities up to 250 watts/in2 (30 watts/cm2).High Rates and Performance With higher power densities, you can coat a substrate faster. So Angstrom Sciences maximizes both your coating zone and your target utilization (usually in the 40% range) without a trade-off in rate.Greater Uniformity Thanks to our patented profiled magnets, our magnetrons also deliver much greater uniformity of deposition - routinely in the ± 3-5% range.Total Commitment All Angstrom Sciences’ magnetrons are guaranteed against defects in workmanship and materials for two full years. Magnetrons are our core business, and we stand ready to ensure your satisfaction. |
