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Angstrom Sciences’ circular rotary magnetrons incorporate a moving magnet array within a planar circular magnetron design. This rotating array provides a precise magnetic field for ±2% film uniformity and 50% high target utilization. Rotary magnetrons come with a speed control monitor, adjustable from 1RPM-170ROM, with digital display. Angstrom Sciences’ standard rotary magnetron is a direct cooled design with an external flange mount. Rotary Magnetrons are available in 4", 6", 6.75", 8", 9.25", 10", 12", and 16" Outer Diameters. |
