ONYX® 4" Rotary, DC / IC Target, High Uniformity Magnetics |
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| Magnetron Specifications: US Specifications | Metric Specifications |
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| Construction |
| Anode |
304 Stainless Steel |
| Cathode Body |
OFHC Copper |
| Insulator |
PTFE / CTFE |
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| Cooling Requirements |
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| Dimensions |
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| General |
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| Maximum Sputtering Power * |
| Cathode Voltage |
100 - 1500 Volts |
| Direct Cooled Mode, DC |
3 kW |
| Direct Cooled, Mode, RF |
Consult Factory |
| Discharge Current |
0.1 - 6 Amps |
| Indirect Cooled Mode, DC |
Consult Factory |
| Indirect Cooled Mode, RF |
Consult Factory |
| Operating Pressure |
1 - 50 mTorr |
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| Mounting, Standard |
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| Power Requirements |
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| Target |
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| Specifications Disclaimer |
- All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
- All sources are available in external configurations.
- * Maximum power for cathode only, a target material’s properties, such as, thermal and electrical conductivity may limit the maximum process power level.
- Some custom-engineered and specialty magnetrons may not meet standard specifications.
- Specifications are subject to change without notice.
- Typical performance. Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
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| Please contact us for specifications regarding your application. |
