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Angstrom Sciences’ Ultra High Vacuum circular magnetron sputtering cathode is a true UHV design bakeable up to 400 °C and comes equipped with a demountable magnet pack. The UHVs all-welded construction prevents out-gassing that may occur with the use of elastomer seals. The UHV Magnetron is fully compatible with all DC and RF power supplies. For RF applications, Angstrom Sciences provides an RF shield to prevent reflected power. Angstrom Sciences provides with a complete range of accessories such as insertion tubes, gas inlets, shutters, and contamination shields. UHV circular magnetrons are indirect cooled and available in 1"-10" outer diameters. |
