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Cylindrical Magnetrons

Specifications

Magnetron Specifications: US Specifications | Metric Specifications

Cooling Requirements

Flow Rate
Maximum Input Temperature

General

Magnetic Enhancement	Permanent (NdFeB) Encapsulated
Maximum Temperature
Mounting	"O" -Ring Seal Flange
Source to Substrate Distance
Uniformity (Static)	Adjustable to better than +/- 2%

Maximum Sputtering Power *

Cathode Voltage	100 to 1500 Volts Continuous 3000 Strike
Discharge Current	300 Amps Maximum
DC	120 Kilowatts
MF	60 Kilowatts

Target

Cooling	Direct / Indirect
Diameter
Fixation	NW 50/60 Flange
Form	Cylindrical

Specifications Disclaimer

All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
* Maximum power for cathode only, a target material’s properties, such as, thermal and electrical conductivity may limit the maximum process power level.
Specifications are subject to change without notice.
Typical performance. Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.

Please contact us for specifications regarding your application.

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Last Update: Jul 01, 2010