Magnetrons

Angstrom Sciences’ magnetrons are engineered to meet stringent thin film uniformity, target utilization, and sputter rate specifications. In addition to the advanced performance results provided by the profiled magnets and turbulent water flow of the Angstrom Advantage™, Angstrom Sciences’ magnetron sputtering cathodes offer a host of other efficiencies.

Versatile, Compact Design

ONYX® magnetron sputtering cathodes are ultra compact and specially designed for compatibility with complex multi-cathode cluster assemblies. This versatile construction allows scalability, making ONYX® magnetrons an ideal option for system upgrades and retrofit applications.

Total Power Compatibility

Low impedance sputter heads are RF, DC, mid-frequency DC, pulsed DC, and microwave power compatible.

Standard Fittings

Angstrom Sciences utilizes ISO NW standard fittings and Conflat® metal seal flanges. All utilities are maintained at atmosphere and are accessed through standard o-ring compression fittings for ease of installation in any vacuum system.

High Performance

Angstrom Sciences’ magnetrons operate at low process pressures, in the 10^-4 Torr range and can deliver practical power densities in excess of 300 watts per square inch. Higher power densities allow ONYX® magnetrons to maximize both the process coating zone and target utilization without compromising sputter rate.

Better Film Uniformity

Standard ONYX® magnetron sputtering cathodes routinely provide deposition uniformities in the ±3 - ±5% range; however, Angstrom Sciences provides magnet arrays to suite client specifications. One research customer has even documented uniformity of ±0.1% with an ONYX® magnetron.

Cleaner Process

The addition of an anode shield permits operation at lower voltage and pressure, because the anode shield decreases the distance between the cathode and anode (ground plane). Shields also blocks debris from falling in the space between the anode and cathode, preventing electrical short circuits and arcing.

Full Range of Sizes

Angstrom Sciences’ circular magnetrons are available in 1-16 inch target diameters. Linear magnetrons are available in target widths of 1.5 to 12 inches and in target lengths from 1 to 13 feet. Rotating cylindrical magnetron sputtering cathode assemblies are designed to accommodate target diameters from 3-6 inches in diameter.

Total Commitment

Magnetron sputtering cathodes are Angstrom Sciences’ core product, and we are committed to making sure you have the highest quality sputter deposition tool. Every ONYX® magnetron is ensured against flaws in workmanship and materials for 2 years - the longest warranty in the industry. We stand ready to provide you any help you may need in specification, installation, start-up, and service.