target thickness |
| The following table provides recommended target thickness values (in inches and millimeters) for non-magnetic and magnetic targets (Ni used as an example) for our Standard, Magnetic Stage I, Magnetic Stage II, UHV Standard, and UHV Magnetic circular magnetrons. |
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| For materials that are more coercive than Nickel, the recommended thickness will decrease in proportion to the relative coercivity. Similarly, thicker targets of less coercive materials can be sputtered. |
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| Angstrom Sciences rectangular magnetrons are designed with application-specific magnetics. That's why it's important that we thoroughly understand your requirements. Our "application questionnaire" available on our web site or via fax, has been designed for this purpose. |
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|
| Standard (STD) |
| ONYX |
1 |
2 |
3 |
4 |
| Non-Magnetic |
0.0625" |
0.250" |
0.250" |
0.250" |
| |
1.5875 mm |
6.35 mm |
6.35 mm |
6.35 mm |
| Magnetic |
0.005" |
0.020" |
0.020" |
0.020" |
| |
0.127 mm |
0.508 mm |
0.508 mm |
0.508 mm |
|
|
| |
| Stage I Magnetic (MAG I) |
| ONYX |
1 |
2 |
3 |
4 |
| Non-Magnetic |
X |
0.250" |
0.250" |
0.250" |
| |
|
6.35 mm |
6.35 mm |
6.35 mm |
| Magnetic |
X |
0.060" |
0.060" |
0.060" |
| |
|
1.524 mm |
1.524 mm |
1.524 mm |
|
|
| |
| Stage II Magnetic (MAG II) |
| ONYX |
1 |
2 |
3 |
4 |
| Non-Magnetic |
0.125 |
0.250 |
0.250 |
0.250 |
| |
3.175 mm |
6.35 mm |
6.35 mm |
6.35 mm |
| Magnetic |
0.060" |
0.125" |
0.125" |
0.125" |
| |
1.524 mm |
3.175 mm |
3.175 mm |
3.175 mm |
|
|
| |
| Ultra High Vacuum (UHV) |
| ONYX |
1 |
2 |
3 |
4 |
| Non-Magnetic |
0.125" |
0.125" |
0.125" |
0.250" |
| |
3.175 mm |
3.175 mm |
3.175 mm |
6.35 mm |
| Magnetic |
0.005" |
0.020" |
0.020" |
0.020" |
| |
0.127 mm |
0.508 mm |
0.508 mm |
0.508 mm |
|
|
| |
| UHV Stage II Magnetic (UHV MAG II) |
| ONYX |
1 |
2 |
3 |
4 |
| Non-Magnetic |
0.125" |
0.250" |
0.250" |
0.250" |
| |
3.175 mm |
6.35 mm |
6.35 mm |
6.35 mm |
| Magnetic |
0.030" |
0.060" |
0.060" |
0.125" |
| |
0.762 mm |
1.524 mm |
1.524 mm |
3.175 mm |
|
|
| |
| |
|
| Standard (STD) |
| ONYX |
5 |
6 |
8 |
|
| Non-Magnetic |
0.250 |
0.250 |
0.250 |
|
| |
6.35 mm |
6.35 mm |
6.35 mm |
|
| Magnetic |
0.020" |
0.020" |
0.020" |
|
| |
0.508 mm |
0.508 mm |
0.508 mm |
|
|
|
| |
| Stage I Magnetic (MAG I) |
| ONYX |
5 |
6 |
8 |
|
| Non-Magnetic |
0.250 |
0.250 |
0.250 |
|
| |
6.35 mm |
6.35 mm |
6.35 mm |
|
| Magnetic |
0.060" |
0.060" |
0.060" |
|
| |
1.524 mm |
1.524 mm |
1.524 mm |
|
|
|
| |
| Stage II Magnetic (MAG II) |
| ONYX |
5 |
6 |
8 |
|
| Non-Magnetic |
0.250 |
0.250 |
0.250 |
|
| |
6.35 mm |
6.35 mm |
6.35 mm |
|
| Magnetic |
0.187" |
0.250" |
0.250" |
|
| |
4.75 mm |
6.35 mm |
6.35 mm |
|
|
|
| |
| Ultra High Vacuum (UHV) |
| ONYX |
5 |
6 |
8 |
|
| Non-Magnetic |
0.250 |
0.250 |
0.250 |
|
| |
6.35 mm |
6.35 mm |
6.35 mm |
|
| Magnetic |
0.020" |
0.020" |
0.020" |
|
| |
0.508 mm |
0.508 mm |
0.508 mm |
|
|
|
| |
| UHV Stage II Magnetic (UHV MAG II) |
| ONYX |
5 |
6 |
8 |
|
| Non-Magnetic |
0.250 |
0.250 |
0.250 |
|
| |
6.35 mm |
6.35 mm |
6.35 mm |
|
| Magnetic |
0.125" |
0.125" |
0.125" |
|
| |
3.175 mm |
3.175 mm |
3.175 mm |
|
|
|
| |
 |
The above numbers reflect recommended material thickness for optimal performance and are not indicative of maximum thickness capability. |
|
Magnetic material thicknesses are projected with Nickel targets. |
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