In 2001, Angstrom Sciences patented a profiled magnet array that optimizes the shape of the magnetic field beyond that capability of standard magnet constructions. Profiled magnetic poles stretch the width of the magnetic field and activate a higher percentage of the sputter target area. Improved active area results in less particulate contamination from the target surface and higher target utilization. An additional advantage to the use of profiled magnets is the opportunity to create unique magnet arrays that can be optimized to provide specific process requirements, such as:
Increased rate and higher process throughput.
Greater target utilization and lower overhead material costs.
Improved uniformity for higher quality thin films.
