Threaded Target ClampAngstrom Sciences’ threaded target clamp design for circular magnetrons was initially developed to create large, multiple-cathode assemblies for restrictive chamber spaces. This threaded design reduces the overall size of a cathode for a given target diameter and, within cluster assemblies, provides a smaller angle of incidence to the substrate, resulting in better uniformity.Threaded clamping also provides flexibility within a client’s application, allowing for variations in target thickness. Target changes are quick and easy without the use of ancillary tools or devices, minimizing system downtime. |
