the angstrom advantage |
| Greater Control |
| All reputable manufacturers of magnetron sources use rare-earth permanent magnets to confine the plasma and direct the flow of atoms during the sputtering process. |
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| But that's where the similarity between their magnetrons and ours ends. |
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| Because, to optimize performance for any application, you have to be able to control the shape of the magnetic field. And even the most carefully calculated placement of conventional magnets can't do that as well as the advanced new method we've developed and patented. |
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| Profiled Magnets |
| Simply put, we profile our magnets. That is, we start with NdFeB magnets - which are 30% more powerful than other rare-earth magnets, so they have an exceptionally strong field to start with - then we grind them into contours which optimize the shape of the field they generate. That's critically important, because the shape of the magnetic field above the target determines everything from film uniformity and deposition rate to target utilization. |
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| This approach allows us to use computer modeling to match your application with the magnetic profile that will work best for you. We can even custom-engineer magnetics to meet your specific requirements. |
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| (Some manufacturers have tried to achieve similar results by installing secondary magnets to alter the shape of the field. Unfortunately, that method not only costs more to manufacture, but provides less flexibility than profiled magnets. And it also generates stray field lines which reduce uniformity.) |
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Angstrom Sciences |
Profiled Magnets |
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Other Magnetrons |
Ordinary Magnets |
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[click drawings to enlarge] |
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| Optimized Performance |
| The result is, you get exactly the kind of performance you need - whether it's high uniformity and target utilization, high rate and throughput, or a perfect balance between the two. And you get that performance in a state-of-the-art device that provides many other exclusive advantages as well. Such as, the option of balanced or unbalanced magnetron fields. |
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Balanced Magnetrons |
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Balanced Magnetrons have a tightly confined magnetic field. So the magnetic "lines of force" remain close to the target surface and the plasma is strongly confined to this area. This allows the field to be more easily optimized for high target utilization or rate. And, since electrons and ions are less likely to strike the substrate, the substrate stays cooler. |
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Unbalanced Magnetrons |
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Unbalanced Magnetrons are characterized by a less tightly confined magnetic field, so the magnetic "lines of force" extend further out in the chamber. Electrons and ions are therefore less tightly bound to the target region, and electrons in particular can readily reach the substrate. The higher electron density near the substrate heats it to a higher temperature, and provides a mechanism for ionization; both of which can be important in the formation of special films. |
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| More Efficient Cooling |
| Turbulent water flow is another advance we've pioneered, patented, and built into every one of our magnetrons. |
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| It's superior to old-fashioned laminar water flow because it distributes cooling more evenly and efficiently across the cathode body. So it not only allows us to use the stronger NdFeB magnets we described above, it also helps minimize "hot spots" and eliminate both grain boundary dissociation and cracking of thermally sensitive materials. |
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| Faster, Easier Target Change |
| Angstrom Sciences' circular magnetrons also incorporate our patented threaded target clamping system, which helps minimize downtime by providing the fastest, easiest method available for changing targets. Plus, it adjusts for variable target thickness without extra tools or devices. |
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| Stronger Magnetrons |
| Unlike most manufacturers, we machine each of our standard magnetrons out of solid blocks of 304 stainless steel and OFHC copper. So you can count on getting maximum magnetic integrity, encased in the most robust precision-fitted assembly you can buy. |
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| More Comprehensive Service |
| Angstrom Sciences designs, engineers, and manufactures a complete line of sputtering sources for everything from research and development to full-scale production applications. |
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| And we offer a comprehensive array of targets, evaporation materials, backing plates, and bonding techniques, too. |
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| But we also pride ourselves on the ability to rise to any occasion. So if you don't find what you're looking for in our literature, please don't hesitate to call. We'll be happy to work with you, to help you incorporate the latest advances in magnetron technology into your own sputtering applications. |
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| A Broad Range Of Solutions |
| Unlike other magnetron suppliers, we at Angstrom Sciences, have designed not only our products, but our entire business, to serve your specific coating needs. |
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| That's why we make the industry's most comprehensive line of precision magnetrons for all applications. That's why we provide computer modeling and expert consulting to optimize your sputtering operations. And that's also why we stand ready to design and build the world's finest custom magnetrons, when necessary, to make your process as productive as possible. |
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| The Angstrom Advantage |
| Most important of all, that's why we've patented our own revolutionary breakthroughs in magnetron technology - which we refer to collectively as The Angstrom AdvantageTM - because we know the advantage they provide will give you a whole new level of control over the sputtering process. |
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| And that control will help you create higher quality films more cost-effectively than ever before. |
