Direct Cooled - Indirect Cooled Circular Magnetron
Angstrom Sciences’ direct cooled / indirect cooled circular magnetrons provide maximum flexibility to your sputter process. Its versatile design can operate in direct cooled or indirect cooled mode.
Each DC / IC Cathode comes equipped with a standard bolt-on, O-ring-sealed backing plate that mounts directly to the cathode body. Operate in indirect-cooled mode by clamping your target to the backing plate assembly.